Development of Nanofabrication Technique Based on Localized Photocatalytic Reaction Using TiO<sub>2</sub>-Coated AFM Probe

Proceedings of JSPE Semestrial Meeting

2016 JSPE Spring Conference

Session ID : E31

DOI https://doi.org/10.11522/pscjspe.2016S.0_333

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Host: The Japan Society for Precision Engineering

Development of Nanofabrication Technique Based on Localized Photocatalytic Reaction Using TiO₂-Coated AFM Probe

*Naohiro Iio, Hiromi Furukawa, Moeto Nagai, Takayuki Shibata

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Keywords: Atomic force microscope (AFM), Photocatalytically active TiO₂-coated probe, Photocatalytic oxidation, Nanofabrication, MEMS

CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

[in Japanese]

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© 2016 The Japan Society for Precision Engineering

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