Proceedings of JSPE Semestrial Meeting
2016 JSPE Spring Conference
Session ID : A33
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Host: The Japan Society for Precision Engineering

Study on measurement of surface texture with optically trapped micro-sphere (3rd report)
Position control of optically trapped micro-spherical lens near substrate
*Yuki Yamaguchi, Masaki Michihata, Yasuhiro Mizutani, Yasuhiro Takaya
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Keywords: microsphere, laser trapping, surface topography, position control, imaging
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[in Japanese]
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© 2016 The Japan Society for Precision Engineering
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