2016 JSPE Spring Conference
Session ID : G36
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Host: The Japan Society for Precision Engineering
Effects of Grinding Wheel and Wafer Relative Velocity Ratio on Surface Roughness using Vertical Spindle Surface Grinding Machine with Rotary Table
*Jumpei Kusuyama, Shintaro Iwahashi, Takayuki Kitajima, Akinori Yui, Toshihiro Ito
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