Proceedings of JSPE Semestrial Meeting
2016 JSPE Spring Conference
Session ID : A68
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Host: The Japan Society for Precision Engineering

[title in Japanese]
*Michitaka Kawada, Takashi Sawada, Kohsei Terao, Takeyuki Hoshi, Shigemitsu Koga, Ryo Yamazaki, Thanh Tung Vu, Masato Higuchi, Masato Aketagawa
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Keywords: 5 free degree error motion, Concentric circular diffraction grating, Michelson interferometer, Diffraction grating interferometer, Sinusoidal frequency moduration method
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[in Japanese]

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© 2016 The Japan Society for Precision Engineering
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