Proceedings of JSPE Semestrial Meeting
2016 JSPE Spring Conference
Session ID : J03
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Host: The Japan Society for Precision Engineering

Mechanical Property Measurement of 3C-SiC Film-derived Nanowires Using MEMS-based Tensile Test Technique
*Kosuke Tanaka, Viet Dzung Dao, Takahiro Namazu, Shozo Inoue
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Keywords: Tensile test, 3C-SiC Film, nanowire, Mechanical Property
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[in Japanese]
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© 2016 The Japan Society for Precision Engineering
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