Debelopment of force sensor using micro hydraulic-drive mechanism

Abstract

We developed micro hydraulic-driven mechanism for sensing small force. This mechanism can measure small force acting on the tips by using Pascal's principle. Generally, the measurement precision decreases when the sensor is downsized. But, the prototype of this mechanism can get an amplification of the force which amplification factor is 1000 times over. In this report, we describe about basic characteristic of the developed prototype.