Proceedings of JSPE Semestrial Meeting
2016 JSPE Spring Conference
Session ID : Q43
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Host: The Japan Society for Precision Engineering

Influence of crystal orientation and UV-ray irradiation on critical depth of cut of SiC
*Toshiyuki Kotsuji, Minoru Ota, Kai Egashira, Keishi Yamaguchi
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Keywords: SiC, Critical depth of cut, UV-ray irradiation, Affected layer, Scratch test
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[in Japanese]
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© 2016 The Japan Society for Precision Engineering
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