2017 JSPE Autumn Conference
Session ID : C16
Conference information
Host: The Japan Society for Precision Engineering
Name : 2017 JSPE Autumn Conference
Location : [in Japanese]
Date : September 20, 2017 - September 22, 2017
Development of ellipsometry using the spin Hall effect of light (2nd report)
Application to surface roughness measurement
Keywords:
Ellipsometry,
Polarization,
Spin Hall effect of light,
Quantum measurement,
Surface roughness
Details
