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2017 JSPE Autumn Conference

Displaying 1-50 of 503 articles from this issue

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[title in Japanese]

Yuta Nakahira, Ai Isohashi, Pho Bui, Tatsuaki Inada, Daisetsu Toh, Hid ...

Session ID: A01
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_1

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Investigation of the influence of abrasive particle adsorption to the filter pore surface on filterability of CMP slurries

Masato Sumiya

Session ID: A02
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_3

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CMP slurries were filtered by porous membrane filters of various materials to investigate the effect of surface property on filterability. All the filtrates not depending on the membrane materials showed reduction of abrasive particle concentration followed by immediate recovery at filtration startup. A mechanism of the results would be (a) significant amount of adsorption of abrasive particles at startup, (b) restraint of capture of additional abrasive particles by repulsion between adsorbed particles and dispersed particles. The mechanism indicates that naked surface property of the membranes would have no effect on filterability; instead property of adsorbed abrasive particles would dominate whole filtration process. The adsorption of abrasive particles was found to cause a significant increase and deviation of initial delta P. Pretreatment of the membrane filters with capturing small amount of abrasive particles was effective to restrain the increase and deviation of initial delta P.

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[title in Japanese]

Hiroshi Kimura, Koichi Yoshida

Session ID: A03
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_5

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Particle removal characteristics in liquid flow during wafer rotation.

Naoyuki Handa, Satomi Hamada, Masayoshi Imai, Yutaka Wada, Hiroshi Sob ...

Session ID: A04
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_7

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CMP Characteristics of Quartz Glass Substrates by Aggregated Colloidal Ceria Slurry

Shuhei Kurokawa, Takaaki Toyama, Terutake Hayashi, Eisaku Suda, Jun To ...

Session ID: A06
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_9

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Development of Supplying Device of Enhanced Slurry having Nano-Bubbles with Active Gas and Trial of High Removal Rate Chemical Mechanical Polishing of SiC Substrate

Shinya Mizuuchi, Michio Uneda, Kazutaka Shibuya, Yoshio Nakamura, Daiz ...

Session ID: A07
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_11

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[title in Japanese]

Yuuki Sano, Kazuki Mori, Junnichi Ikeno, Youhei Yamada

Session ID: A08
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_13

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[title in Japanese]

Takahiro Fujino, Akihito Endo, Shinsuke Matsui, Toshiyasu Yajima, Dais ...

Session ID: A13
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_15

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[title in Japanese]

Toshihiro Ito, Eiichi Yamamoto, Shinsuke Matsui, Takahiro Fujino, Akih ...

Session ID: A14
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_17

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[title in Japanese]

Hideka Kida, Daisetsu Toh, Yuta Nakahira, Satoshi Matsuyama, Yasuhisa ...

Session ID: A15
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_19

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Analytical Estimation of Material Removal Rate Distribution in Double-sided Lapping of Rectangle Workpiece

Yohei Hashimoto, Tomoya Sano, Tatsuaki Furumoto, Tomohiro Koyano, Akir ...

Session ID: A17
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_21

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[title in Japanese]

Reiji Ryokume, Ryosuke Ohnishi, Satoshi Matsuyama, Yasuhisa Sano, Kazu ...

Session ID: A18
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_23

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[title in Japanese]

Taiki Kato, Takashi Akimoto, Yohei Yamada, Junichi Ikeno, Takeshi Abe, ...

Session ID: A19
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_25

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Development of the manufacturing technique about advanced surface microstructure using Water-CARE

Okiharu Kirino, Seunbok Lee, Yuji Kawahata, Yasuhisa Sano, Kazuto Yama ...

Session ID: A20
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_27

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In-situ specyroscopic ellipsometry of the Cu surfaces in benzotriazole-hydrogen (BTA-H2O2) solutions using micro flow cell

Koki Segawa, Eiichi Kondoh, Satomi Hamada, Syohei Shima, Hirokuni Hiya ...

Session ID: A22
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_29

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During Cu CMP, Cu surface is oxidized by an oxidizer or a complexiation reagent. To inhibit oxidation, a corrosion inhibitor is co-added in the slurry. Balancing oxidation and surface passivation is of importance in advanced Cu CMP. Layer formation onto clean Cu surfaces in BTA (C6H5N3)-H2O2 aqueous solutions was studied by using in-situ spectroscopic ellipsometry. A rapid flow cell was used and initial changes in an ellipsometric parameter, Δ, which corresponds to the layer thickening, were discussed. BTA forms a passivation layer and the oxidation from H2O2 precedes that.

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Ellipsometoric measurement of paticle-spiked wafer surfaces

Particle attachment using inkjet printer and ellipsometric measurements

Katsuya Suzuki, Eiichi Kondoh, Satomi Hamada, Shouhei Shima, Hirokuni ...

Session ID: A23
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_31

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Cleaning is an important process in the semiconductor manufacturing process. If cleaning is insufficient, contaminating particles will remain on the substrate, causing device failures. We have been studying the evaluation method for developing a new cleaning process. We are focusing on a spectroscopic ellipsometry, which can easily determine the structure of an extremely thin surface layer of sub nm even at the laboratory level, expecting application to particle detection. In this research, we tried detection of nanoparticles on the substrate by using ellipsometry, especially as a simple evaluation method in the laboratory, and proved its usefulness. An industrial inkjet printer was used for precise particle attachment.

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Study on Laser Surface Processing using Femtosecond Double Pulse Beam (8th report)

Application of low damage laser surface cleaning

Terutake Hayashi, Keigo Matsunaga, Syuhei Kurokawa, Noboru Hasegawa, M ...

Session ID: A24
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_33

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[title in Japanese]

Daisetsu Toh, Ai Isohashi, Tatsuaki Inada, Yuta Nakahira, Hideka Kida, ...

Session ID: A25
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_35

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[title in Japanese]

Norikazu Suzuki

Session ID: A31
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_37

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[title in Japanese]

Rei Miyata, Makoto Kato, Yasuhiro Kakinuma, Tomoyuki Aizawa, Kazunori ...

Session ID: A33
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_39

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[title in Japanese]

Soichiro Mizuno, Daisuke Kono, Toshiyuki Muraki, Masamitsu Nakaminami, ...

Session ID: A34
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_41

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Elucidation of fundamental characteristics of counter balance damping system by right and left ball screw drive

Yuya Kawazoe, Toshiki Hirogaki, Eiichi Aoyama

Session ID: A36
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_43

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In recent years, due to demands for lighter, thinner, shorter and more multifunctional electronic devices, it is necessary for the inside printed circuit board to be drilled with high precision. To solve this problem, we propose a drilling machine tool equipped with a counter balance damping system driven by left and right ball screws to reduce vibration. The vibration measurement, the vibration mode analysis and the vibration model of this machine tool showed that the vibration characteristics are greatly affected by the displacement of the center of gravity of the spindle and counter part.

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[title in Japanese]

Kaito Aotani, Toshiki Hirogaki, Eiichi Aoyama

Session ID: A37
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_45

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[title in Japanese]

Hiroaki Nagai, Atsushi Matsubara, Takuma Umezu

Session ID: A38
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_47

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[title in Japanese]

Kan Yamamoto, Keigo Takasugi, Naoki Asakawa

Session ID: A39
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_49

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Compensation for environmental thermal displacement of machine tool based on estimation of thermal deformation of reference space

Hideki Shibahara, Mikito Kumagai, Kazumasa Nagao, Fumiya Yoshimura, Ke ...

Session ID: A43
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_51

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A Method for Evaluating the Speed and Accuracy of CNC Machine Tools

Toshiaki Otsuki, Hiroyuki Sasahara, Ryuta Sato

Session ID: A44
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_53

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An important facet of the contouring performance of machine tools with computer numerical control (CNC) is the machining of workpieces within the desired accuracy and within as short a time as possible. However, conventionally, the accuracy (error) and the speed are evaluated separately. Therefore, in this research, a method is proposed to evaluate the speed and accuracy of CNC machine tools using two-dimensional representations of error and speed based on actual trajectories. Experiments have verified that it is possible to quantitatively evaluate the speed and accuracy of multiple CNC machine tools using two-dimensional graphs of maximum error and actual speed.

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Designing of Desktop Type 5-axis NC Precision Grinder

Investigation of Machine Axis Arrangement and Structural Analysis

Keita Ryo, Susumu Ohishi, Masakazu Fujimoto

Session ID: A45
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_55

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[title in Japanese]

Takumi Fujimura, Toshiki Hirogaki, Eiichi Aoyama

Session ID: A46
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_57

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Intelligent identification of milling process by utilizing disturbance force estimation based on multi-inertial model of ball-screw drive system and cutting simulation

Shoya Ohno, Norikazu Suzuki, Eiji Shamoto, Ryosuke Ikeda, Kazuki Takah ...

Session ID: A61
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_59

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Development of high precision machining method for aluminum alloy forged material

Reduction of machining error by deciding on machining order utilizing prediction of residual stress and strain

Yuya Yamamoto, Tsukasa Nishida, Hiroto Sugano, Koichi Akazawa

Session ID: A62
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_61

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Measurement of drive current value of NC moving table

Measurement of motor torque at table speed reversal

Tatsuya Mukai, Yoshitaka Morimoto, Akio Hayashi

Session ID: A63
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_63

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Time Domain Coupled Simulation of Machine Tool Dynamic Behavior and Cutting Force using Voxel Model Cutting Force Simulator

Shin Noguchi, Isamu Nishida, Ryuta Sato, Keiichi Shirase

Session ID: A64
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_65

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[title in Japanese]

Kazuya Hiraiwa, Toru Kizaki, Naohiko Sugita, Mamoru Mitsuishi, Masatos ...

Session ID: A66
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_67

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Temperature change of spindle caused by water hydrostatic bearings

Rei Kirigaya, Yohichi Nakao, Akio Hayashi

Session ID: A67
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_69

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Development of mechining center structure by topology optimization

Shoichi Kashiwabara, Noritada Okada, Yuto Uchida, Taisuke Isozaki, Nao ...

Session ID: A68
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_71

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Development of integrated cutting information monitoring system

Ichiro Ogura, Hiroyuki Sawada

Session ID: A69
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_73

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In this study, we call the system, which combines In-situ observation of a tool and acquisition of machining information, ″integrated monitoring system″. This system has an aim to establish as a basic device of processing information collection based on IoT. In this report, the concept of the integrated monitoring system was proposed. And a series of data acquisition experiments for milling machine with dynamometer and high-speed camera were conducted. The wet-machining-tool- monitoring-system developed by AIST, also used as camera system. Those results showed validity of our concept and possibility that effective tool management and immediate finding of the optimized cutting condition is achieved.

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Polishing Aspheric Mirrors of Zero-thermal Expansion Cordierite Ceramics (NEXCERA) for Space Telescope

Jun Sugawara, Tomohiro Kamiya, Bumpei Mikashima

Session ID: B02
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_75

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In the next-generation optical satellite, improvement of the thermal stability of the optical system is required.As a mirror material of this system, zero expansion ceramic (NEXCERA) is considered to be a promising material to substitute for conventional zero expansion glass. High precision machining of super lightweight aspheric mirror is crucial for satellite mirror. In this presentation we will present the polishing properties of NEXCERA, the precise polishing of parabolic mirror using sub-aperture tools, and the precise polishing of the hyperbolic mirror using MRF.

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Masaya Shirakawa, Naomichi Furushiro, Daisuke Hirooka, Tomomi Yamaguch ...

Session ID: B03
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_77

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Naomichi Furushiro, Masaya Shirakawa, Hideo Yokota, Kazuhiro Fujisaki, ...

Session ID: B04
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_79

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Investigation of Elastic Emission Machining Performance for Optical Micro Cavity

Hikaru Amano, Yuta Mizumoto, Yoshinori Takei, Satoru Egawa, Hidekazu M ...

Session ID: B05
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_81

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Development of precision polymer molding of aspheric lens for disposable endoscope

Shinya Morita, Takuya Hosobata, Yutaka Yamagata, Junichi Uehara, Yutar ...

Session ID: B07
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_83

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Low-cost disposable endoscopes are highly demanded because it is difficult to completely prevent infection by endoscopy. We propose an endoscope with an insert molded integrated optics connected to a pair of polymer optical fibers. The integrated optics consists of an aspheric imaging lens and an illumination prism. The lens forms an in-vivo image on a facet of a multicore fiber to transfer to an imaging device, while the prism illuminates target to be observed using light delivered from a single core fiber. The integrated optics is designed using ray-tracing calculations, which size is 2.5mm wide and 3.9 mm high. Furthermore, we developed facet polishing technique for polymer fiber and molding process for manufacturing. Image acquisition experiments are successfully performed using the developed optics.

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Ultraprecision cutting of SiC using micro milling tool of nano polycrystal diamond

Hirofumi Suzuki, Wataru Asai, Mutsumi Okada, Hitoshi Sumiya, Katsuko H ...

Session ID: B08
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_85

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Material Structure and Applicability for SI-cut in On-the-Machine Surface Modification Technology

Tomoya Kanno, Takeo Tamura, Takayuki Nakagawa

Session ID: B12
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_87

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Study on Analytical Prediction of Shape Change on Convex Part in Large-area EB Irradiation

Yasuaki Kimura, Tsubasa Sakai, Togo Shinonaga, Akira Okada

Session ID: B13
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_89

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Characterization of ion current on ion beam figuring for high precision optics

Koichiro Goto, Kouki Hiraishi, Hiroki Aihara, Hideo Takino

Session ID: B14
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_91

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Measurement of discharge reaction force caused by metal vapor jets in EDM

Xiaoming Yue, Xiaodong Yang, Masanori Kunieda

Session ID: B16
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_93

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This paper describes the measurement of the discharge reaction force in EDM caused by the metal vapor jets from the copper, brass and zinc coated brass wires using a high-precise laser displacement sensor in a single discharge process. Then, based on the above experiments, the influence of the discharge duration and the boiling point of the tool electrode materials on the discharge reaction force were investigated. The experimental results show that lower boiling point of the tool electrode material results in larger discharge reaction force, and longer discharge duration also causes larger discharge reaction force. Furthermore, the value of the discharge reaction force was calculated based on the experimental results using the inverse method.

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Micro EDM Deposition Mechanism using Thin Cu-W Electrode

Takeyuki Yamamoto, Masato Ishii, Itaru Takahama, Jun Shimizu, Libo Zho ...

Session ID: B17
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_95

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Wire electrochemical grinding of tungsten using neutral electrolyte

Wei Han, Masanori Kunieda

Session ID: B18
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_97

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A new method, WECG (wire electrochemical grinding), for tungsten machining with neutral electrolyte and bipolar current is proposed, and the running wire is used as the tool electrode. The problem of tool wear inevitable due to the bipolar current was eliminated because the running wire is used as tool electrode with this method. Three kinds of wire guides were used, the cylindrical cemented tungsten carbide (WC) guide, cylindrical zirconium oxide (ZrO2) guide and plate cemented WC guide, to investigate the differences in the machining characteristics. The experiment results showed that the plate cemented WC wire guide generated a higher machining accuracy because of the less influence of stray current flowing through the gap formed by the machined micro-rod and wire guide. Even if the ZrO2 material has a much lower electrical conductivity than that of the cemented WC, the machining process was also influenced by the stray current between the micro-rod and wire guide. The tungsten micro-rod of 100 μm in diameter was machined with the length of 850 μm.

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Influence of electrolyte concentration on wire-ECM finishing characteristics

Shuntaro Wako, Masanori Kunieda, Takayuki Nakagawa, Takashi Yuzawa

Session ID: B19
Published: September 05, 2017
Released on J-STAGE: March 05, 2018

DOIhttps://doi.org/10.11522/pscjspe.2017A.0_99

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