Development of the stitch algorithm for a free-form measurement machine (6th report)

Measurement and Compensation of the Systematic Error

Abstract

In the case of free-form measurement machine, a conventional stitching calculation method gives a serious calculation error because the measured data are sparse 3D points. So, we have developed a new stitch algorithm named ARSA (Approximated Reference Shape Algorithm). This paper investigates a method to correct the Z systematic error by measuring the planar work piece in six positions. Simulation showed that the systematic error can be measured on the order of nanometers even when the planar work has a micrometer-order shape error and ripple error.