Nanometer Profile Measurement on Large Aspheric Optical Surface(15th Report)

Evaluation of Self Calibration for Autocollimator

Abstract

Recently, large aspheric mirrors and lenses with high accuracy are widely used in the telescopes, semiconductor exposure apparatuses and other industries. However, measuring method of large aspheric optical surface is not confirmed. So, the goal of our research is to measure the profile of large aspheric optical surface with accuracy of about 1 nm. We have conducted research on the method of measuring aspheric surface scanning autocollimator. In our previous study, self calibration method of sensitivity of autocollimator which can be conducted in experimental set up was proposed. In this report, we evaluate the self calibration method by several experiments.