2017 JSPE Autumn Conference
Session ID : D33
Conference information
Host: The Japan Society for Precision Engineering
Name : 2017 JSPE Autumn Conference
Location : [in Japanese]
Date : September 20, 2017 - September 22, 2017
Elucidation of Multi-Physics Phenomenon on Chemical Mechanical Polishing Process by Computational Simulation
Keywords:
first-principles calculation,
molecular dynamics method,
chemical mechanical polishing,
multi-physics phenomenon
Details
