Proceedings of JSPE Semestrial Meeting
2017 JSPE Autumn Conference
Session ID : E38
Conference information

Host: The Japan Society for Precision Engineering

Name : 2017 JSPE Autumn Conference

Location : [in Japanese]

Date : September 20, 2017 - September 22, 2017

Study on granularity design of capacity-equalized mold for nanoimprint lithography
*Sung-Won Youn, Kenta Suzuki, Hiroshi Hiroshima
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Keywords: Nanoimprint lithography, Mold design, Capacity-equalized mold, Residual layer thickness, Granularity
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Abstract
[in Japanese]
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© 2017 The Japan Society for Precision Engineering
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