Proceedings of JSPE Semestrial Meeting
2017 JSPE Autumn Conference
Session ID : G65
Conference information

Host: The Japan Society for Precision Engineering

Name : 2017 JSPE Autumn Conference

Location : [in Japanese]

Date : September 20, 2017 - September 22, 2017

Computational analysis of chemical mechanical polishing process for GaN substrate with step structure
*Takuya Igarashi, Jingxiang Xu, Yusuke Ootani, Nobuki Ozawa, Momoji Kubo
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Keywords: molecular dynamics simulation, GaN, CMP
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[in Japanese]
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© 2017 The Japan Society for Precision Engineering
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