Proceedings of JSPE Semestrial Meeting
2017 JSPE Autumn Conference
Session ID : K16
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Development of fine motion table supported by squeezed air films based on levitation force control
*Yuuma TamaruTetsuya MatsumotoHiroki Shimizu
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CONFERENCE PROCEEDINGS FREE ACCESS

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[in Japanese]
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© 2017 The Japan Society for Precision Engineering
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