2017 JSPE Autumn Conference
Session ID : L20
Conference information
Host: The Japan Society for Precision Engineering
Name : 2017 JSPE Autumn Conference
Location : [in Japanese]
Date : September 20, 2017 - September 22, 2017
Fine processing of polymer surface by a scanning nanopipette probe microscope capable of irradiating an atmospheric pressure plasma jet using helium source gas mixed with water vapor
*Sho Yamamoto, Daisuke Morimatsu, Atsushi Nakamura, Akihisa Ogino, Masaaki Nagatsu, Futoshi Iwata
Author information
Keywords:
Atmospheric pressure plasma jets,
polymer,
Nano fabrication,
Scanning probe microscope,
Nanopipette
Details
