Profile measurement of concave spherical mirror using point diffraction interferometer

Hybrid analysis combined with phase shift method and local model fitting method

Abstract

Recently, high accuracy concave spherical mirror is required in many field. Then we develop the PDI(point diffraction interferometer).we analyse interference fringe using hybrid analysis combined with phase shift method and local model fitting method, and measure the profile in vibration environment. Cosequentlly, we redduce the effect of vibration comrared with usual phase shift PDI.