2017 JSPE Spring Conference
Session ID : B74
Conference information
Host: The Japan Society for Precision Engineering
Name : 2017 JSPE Spring Conference
Date : March 13, 2017 - March 15, 2017
Study on grinding stone using thermoplastic resin bonding material (1st report)
Effect of viscoelasticity of bonding material on grinding performance
*Lingxiao GAO, Yuichi Saka, Hidetoshi Fujino, Takashi Kurokawa, Hiroshi Ito, Kozo Sakai, Kazuhito Ohashi
Author information
Keywords:
Grinding,
Bonding material,
Thermoplastic resin,
Viscoelasticity,
Loss tangent,
SiC single crystal wafer
Details
