2017 JSPE Spring Conference
Session ID : G78
Conference information
Host: The Japan Society for Precision Engineering
Name : 2017 JSPE Spring Conference
Date : March 13, 2017 - March 15, 2017
Development of Measuring Device for Polishing Pad Pasted Upper Platen of Double-Sided Polisher and Its Application for Polishing Characteristics Evaluation
*Kosuke Hayakawa, Michio Uneda, Kazutaka Shibuya, Yoshio Nakamura, Daizo Ichikawa, Ken-ichi Ishikawa
Author information
Keywords:
Polishing,
Double-Sided Polishing,
Polishing Pad Surface Asperity,
Contact Image Analysis,
Conditioning
Details
