Proceedings of JSPE Semestrial Meeting
2017 JSPE Spring Conference
Session ID : I03
Conference information

Host: The Japan Society for Precision Engineering

Name : 2017 JSPE Spring Conference

Date : March 13, 2017 - March 15, 2017

Substrate Processing by New VDF Pad
Processing Characteristics for Sapphire Substrate by VDF Pad with Stepped Pillars
*Osamu Ohnishi, Toshiro Doi, Masafumi Takesue, Kazuo Saito, Keisuke Sasashima
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Keywords: VDF Pad, Sapphire, Removal Rate, Processed Surface, Processing Mechanism
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[in Japanese]
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© 2017 The Japan Society for Precision Engineering
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