Proceedings of JSPE Semestrial Meeting
2017 JSPE Spring Conference
Session ID : I02
Conference information

Host: The Japan Society for Precision Engineering

Name : 2017 JSPE Spring Conference

Date : March 13, 2017 - March 15, 2017

Processing conditions study of vertical holes structure type polishing pads
*Kanon Uchida, Yu Zhang, Yasuhiro Tani
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Keywords: kenma pad, surari, epokisi, glass
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Abstract
[in Japanese]
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© 2017 The Japan Society for Precision Engineering
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