Fabrication of Metallic Micro Line and Space Structure by Chemical Stamping

Abstract

In this study, a high efficient fabrication process for metallic micro line and space structure is developed. A COP(Cyclo Olefin Polymer) mold, prepared by hot embossing line and space structure of a Ni-P mother mold (fabricated by ultra precision cutting), is used to stamp a patterned chemical structure on the substrate. After coating Au thin film by sputtering and a peeling process. a micro scale metallic line and space micro structure can be fabricated on the substrate.