Proceedings of JSPE Semestrial Meeting
2018 JSPE Autumn Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2018 JSPE Autumn Conference

Location : [in Japanese]

Date : September 05, 2018 - September 07, 2018

Substrate Processing by New VDF Pad
Processing Characteristics for Sapphire Substrate in Long Processing Time
*Osamu Ohnishi, Toshiro Doi, Masafumi Takesue, Kazuo Saito, Keisuke Sasashima
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Keywords: VDF Pad, Sapphire, Removal Rate, Processed Surface
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 283-284

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[in Japanese]
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© 2018 The Japan Society for Precision Engineering
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