Proceedings of JSPE Semestrial Meeting
2018 JSPE Autumn Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2018 JSPE Autumn Conference

Location : [in Japanese]

Date : September 05, 2018 - September 07, 2018

Long-term stability and uniformity of water film prepared using water-film chuck
*Kenichiro Yoshitomi, Atsunobu Une, Tsubasa Bando, Eiichi Yamamoto
Author information
Keywords: water film chuck, silicon wafer, backgrinding, multilayer semiconductor, surface tension
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 285-286

Details
Download PDF (692K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2018 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top