2018 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2018 JSPE Spring Conference
Location : [in Japanese]
Date : March 15, 2018 - March 17, 2018
Study on On-Machine Visualization of Surface Processing Phenomena in Nanoscale-4th: Estimation of longitudinal Resolution
*Hiroaki Shirakawa, Aran Blatter, Ryo Takemoto, Panart Khajornrungruang, Keisuke Suzuki
Author information
Keywords:
Evanescent light,
nano particle,
scattering light,
multi-wavelength,
polishing,
nano-scale
Pages 129-130
Details
