As the miniaturization of devices progresses and the demand for next-generation functional products such as meta-material rises, processing method for three-dimension nanostructures has been highly required. In this study, we propose a processing method aiming for fabricating three-dimension nanostructures with sub-100 nm resolution, by utilizing optical radiation pressure potential of Bessel beam to localize particles in a range smaller than diffraction limit. In this report, we investigated some basic characteristics of the Bessel beam created by an Axicon and conducted the preparation for basic experiments.

It is known that when diamond is used to machine ferrous materials, diamond wears out considerably. In the present study, this phenomenon was used in reverse, and the diamond was grooved by rubbing between the circumferential face of the rotated steel disk and the (111) plane of the diamond. Grooves having a depth of several tens of micrometers could be formed by machining for about 20 minutes.

The aim of our study is to improve efficiency of AFM nano-machining by using vibration assisted cutting. In this report, we discussed about a profile of cutting laver with stable vibrating while machining. In this report, we discussed about a profile of cutting lever which is able to vibrate continuously while machining. Consequently, stable vibration with about 15.6 kHz was observed in our designed cantilever. A series of nano-cutting experiments using this cutting tool was conducted with cutting forces of 50 - 800 micro-Newton and obtained cutting marks of vibration assisted cutting were much deeper than normal cutting.

This paper presents a new methodology for fabrication of Au nanograting pattern. Evanescent field enhancement based on nanograting is well studied for enhancing sensitivity of surface plasmonic detection. However, the practical application of this method suffered from high fabrication cost and low throughput. To solve this problem, a process combining nanomachining and Au cold welding was proposed in this work. Ultraprecision cutting was conducted to fabricate a parallel groove pattern on a mother mold substrate. The mother mold structure was replicated to a Poly (methyl methacrylate) stamp by die casting. And the stamp was utilized to transfer Au nanograting on an Au film deposited on a quartz based on Au cold welding adhering and surface energy difference between substrate and stamp. The feasibility of the proposed fabrication process was verified. Furthermore, the influences of film thickness and welding load on transferring ratio and structural uniformity were evaluated.

Generally, programs for machining curved shapes with CNC(Numerical Control) machine tools are generated of approximated linear segments based on a set chord error. However, we think that it is desirable to generate programs by changing it to a more suitable chord error for high speed and high accurate machining. In this research, we propose a method to calculate a suitable chord error from curvature radius, commanded federate and CNC′s block processing time, and to generate programs based on the chord error. By experiments, it was verified that the CNC machine tools move with higher speed and higher accuracy with programs generated by this method.

Recentry, due to the lighter, thinner, shorter and more multifunctional electronic equipment, high precision through hole processing is required on the printed circuit board. Therefore, in this study, vibration reduction at the column of machine tool is realized by mounting counter balance feed mechanism by right and left ball screw drive on machine tool. It can be confirmed that it is important to determine the weight and center of gravity position of the spindle and counter while maintaining the driven at center of gravity (DCG), and also proposed guidelines for the design method of this vibration reduction mechanism.

Processing of the sapphire is difficult because of its high hardness. The sapphire is stable material, however, it is known that chemical reaction is occurred with silicon oxide under high temperature and high pressure. In this study, using this phenomenon, a circular groove processing of the sapphire by a cylindrical steel in silicon oxide suspension. As a result, the sapphire was processed to circular groove shape. Its outer diameter was 4mm, inner diameter was 2mm and depth was about 70μm for 30minutes processing.