Development of nano-scale mechanical cutting technique by using vibrational micro cantilever tool

Abstract

The aim of our study is to improve efficiency of AFM nano-machining by using vibration assisted cutting. In this report, we discussed about a profile of cutting laver with stable vibrating while machining. In this report, we discussed about a profile of cutting lever which is able to vibrate continuously while machining. Consequently, stable vibration with about 15.6 kHz was observed in our designed cantilever. A series of nano-cutting experiments using this cutting tool was conducted with cutting forces of 50 - 800 micro-Newton and obtained cutting marks of vibration assisted cutting were much deeper than normal cutting.