2018 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2018 JSPE Spring Conference
Location : [in Japanese]
Date : March 15, 2018 - March 17, 2018
Nano particle sizing for abrasive grain in CMP slurry using fluorescent nano probe.
Comparison of the geometric diameter and the Stokes diameter
Pages 511-512
Details
