Proceedings of JSPE Semestrial Meeting
2018 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2018 JSPE Spring Conference

Location : [in Japanese]

Date : March 15, 2018 - March 17, 2018

Effect of Slurry Hole in Carrier on Removal Rate of Double-Sided Polishing
*Michiaki Hiyama, Michio Uneda, Kazutaka Shibuya, Yoshio Nakamura, Daizo Ichikawa, Ken-ichi Ishikawa
Author information
Keywords: Double-Sided Polishing, Carrier, Slurry Hole, Removal Rate
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 515-516

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[in Japanese]
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© 2018 The Japan Society for Precision Engineering
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