Proceedings of JSPE Semestrial Meeting
2018 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2018 JSPE Spring Conference

Location : [in Japanese]

Date : March 15, 2018 - March 17, 2018

Dependence of Solution Conditions on Enhanced Etching of Semiconductor Surfaces Assisted by Graphene Catalysts
*Hiroto Yamashita, Tomoki Hirano, Kentaro Kawai, Kazuya Yamamura, Kenta Arima
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Keywords: graphene, catalyst, semiconductor surface, enhanced etching, etching solution
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 649-650

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[in Japanese]
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© 2018 The Japan Society for Precision Engineering
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