Proceedings of JSPE Semestrial Meeting
2018 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2018 JSPE Spring Conference

Location : [in Japanese]

Date : March 15, 2018 - March 17, 2018

Study for the surface interaction force of a shear-mode detection microprobe
*So Ito, Kazuhide Kamiya, Kimihisa Matsumoto, Wei Gao
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Keywords: Microprobe, Shear-mode detection, Surface interaction force
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 657-658

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[in Japanese]
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© 2018 The Japan Society for Precision Engineering
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