Laser Fabrication of Nano-structure Based on Optical Radiation Pressure Potential (1st report)

Apparatus development for basic study on processing principle using Bessel beam

Abstract

As the miniaturization of devices progresses and the demand for next-generation functional products such as meta-material rises, processing method for three-dimension nanostructures has been highly required. In this study, we propose a processing method aiming for fabricating three-dimension nanostructures with sub-100 nm resolution, by utilizing optical radiation pressure potential of Bessel beam to localize particles in a range smaller than diffraction limit. In this report, we investigated some basic characteristics of the Bessel beam created by an Axicon and conducted the preparation for basic experiments.