2019 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2019 JSPE Spring Conference
Location : [in Japanese]
Date : March 13, 2019 - March 15, 2019
Estimating the mid-spatial frequency form deviations on the Ultra precision machining process by using the scale signal branching
*Hao Duan, Shin-ya Morita, Takuya Hosobata, Yutaka Yamagata, Kiichi Enomoto, Masahiro Anzai
Author information
Keywords:
Mid-spatial frequency,
Ultraprecision machine tool,
Scale signal branching,
Form deviation
Pages 682-683
Details
