Proceedings of JSPE Semestrial Meeting
2020 JSPE Autumn Conference
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Study for inner diameter measurement of micro-aperture using a microprobing system with a method of surface interaction force detection
*So ItoDaichi KatoTakaya UenoKazuhide KamiyaKimihisa Matsumoto
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Pages 360

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[in Japanese]
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© 2020 The Japan Society for Precision Engineering
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