Proceedings of JSPE Semestrial Meeting
2020 JSPE Autumn Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2020 JSPE Autumn Conference

Location : [in Japanese]

Date : September 01, 2020 - September 07, 2020

Study for inner diameter measurement of micro-aperture using a microprobing system with a method of surface interaction force detection
*So Ito, Daichi Kato, Takaya Ueno, Kazuhide Kamiya, Kimihisa Matsumoto
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Keywords: Microprobe, Surface interaction force, Micro-CMM, Inner diameter measurement
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Pages 360

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[in Japanese]
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© 2020 The Japan Society for Precision Engineering
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