Proceedings of JSPE Semestrial Meeting
2020 JSPE Autumn Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2020 JSPE Autumn Conference

Location : [in Japanese]

Date : September 01, 2020 - September 07, 2020

[title in Japanese]
*Masato Higuchi, Thanh Dong Nguyen, Tomohiro Sowa, Dong Wei, Masato Aketagawa
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Keywords: displacement measurement, sinusoidal phase modulation, optical interferometer
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 361

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[in Japanese]
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© 2020 The Japan Society for Precision Engineering
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