Proceedings of JSPE Semestrial Meeting
2020 JSPE Autumn Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2020 JSPE Autumn Conference

Location : [in Japanese]

Date : September 01, 2020 - September 07, 2020

Interferometer Periodic Error Measurement Using Electro-Optical Device and Frequency Scanning Laser Diode
*Kosuke Iwafune, Thanh Dong Nguyen, Masato Higuchi, Dong Wei, Masato Aketagawa
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Keywords: displace measurement, heterodyne interferomter, periodic error
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 362-363

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[in Japanese]
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© 2020 The Japan Society for Precision Engineering
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