Proceedings of JSPE Semestrial Meeting
2020 JSPE Autumn Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2020 JSPE Autumn Conference

Location : [in Japanese]

Date : September 01, 2020 - September 07, 2020

Research on mounting technology of the ultrathin MEMS strain sensor
*Junya Nakagawa, Seiichi Takamatsu, Toshihiro Itoh, Takahiro Yamashita, Natsumi Makimoto, Ken Kobayashi, Zymelka Maria
Author information
Keywords: Micro Electro Mechanical Systems, strain sensor, Silicon, piezoresistive, anchor
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 489-490

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[in Japanese]
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© 2020 The Japan Society for Precision Engineering
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