Proceedings of JSPE Semestrial Meeting
2020 JSPE Autumn Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2020 JSPE Autumn Conference

Location : [in Japanese]

Date : September 01, 2020 - September 07, 2020

Effect of the crystal orientation of silicon substrates on the fabrication of three-dimensional microstructure
*Sunao Murakami, Hoshito Kihara, Takahiro Ito
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Keywords: etching, microstructures, crystal orientation
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 491-492

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Abstract

[in Japanese]

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© 2020 The Japan Society for Precision Engineering
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