Proceedings of JSPE Semestrial Meeting
2020 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2020 JSPE Spring Conference

Location : [in Japanese]

Date : March 17, 2020 - March 19, 2020

Fabrication of Nanostructured Conductive Polymer
Mask Formation by Talbot Lithography
*Yohei Kato, Arata Kaneko, Ryu Ezaki, Yasuhiro Mizutani, Yasuhiro Takaya
Author information
Keywords: Conductive polymer, Nanostructure, Talbot effect, Lithography, Electrochemical polymerization
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 108-109

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Abstract

[in Japanese]

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© 2020 The Japan Society for Precision Engineering
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