2020 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2020 JSPE Spring Conference
Location : [in Japanese]
Date : March 17, 2020 - March 19, 2020
Observation of Pulse Electroeposition in a Controlled Environment Using Micro Fluidic Device
Copper Electrodeposition into Micro Trenches
Keywords:
Micro Electro Mechanical System,
Pulse current,
Copper Electrodeposition,
Microfluidic device
Pages 107
Details
