2020 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2020 JSPE Spring Conference
Location : [in Japanese]
Date : March 17, 2020 - March 19, 2020
Real Time Nanoscale Observation in Cleaning Phenomena by Evanescent Field
2nd report : Non-contact Removal of Abrasive Nano-particles during Enforcing Mega sonic
*Yutaka Terayama, Panart Khajornrungruang, Keisuke Suzuki, Thitipat Permpatdechakul, Satomi Hamada, Yutaka Wada, Hirokuni Hiyama
Author information
Keywords:
non-contact cleaning,
mega sonic,
ultrasonic,
silica nano-particle,
evanescent field,
on-surface nanoscale phenomena
Pages 660-661
Details
