2022 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2022 JSPE Spring Conference
Location : [in Japanese]
Date : March 15, 2022 - March 17, 2022
Real Time Nanoscale Observation in Cleaning Phenomena by Evanescent Field
5th report：Advantage in sub-50 nm Silica Particle Observation
*Yutaka Terayama, Panart Khajornrungruang, Keisuke Suzuki, Ryotaro Mori, Satomi Hamada, Yutaka Wada, Hirokuni Hiyama
Author information
Keywords:
standard silica nanoparticle,
wet condition,
evanescent field,
dark field,
silica glass substrate
Pages 126
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