2022 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2022 JSPE Spring Conference
Location : [in Japanese]
Date : March 15, 2022 - March 17, 2022
Development of Slurryless Ultrasonic-Assisted Electrochemical Mechanical Polishing Method for Hard-to-Finish Materials (Report 3)
Study of polishing for 4inch SiC wafers
Pages 127
Details
