Proceedings of JSPE Semestrial Meeting
2022 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2022 JSPE Spring Conference

Location : [in Japanese]

Date : March 15, 2022 - March 17, 2022

Development of plasma-assisted polishing method
Evaluation of oxidation rate of SiC component and Si component in RS-SiC
*Tong Tao, Rongyan Sun, Kentaro Kawai, Kenta Arima, Kazuya Yamamura
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Keywords: RS-SiC, Oxidation rate, Plasma assisted polishing
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 129

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[in Japanese]
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© 2022 The Japan Society for Precision Engineering
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