2022 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2022 JSPE Spring Conference
Location : [in Japanese]
Date : March 15, 2022 - March 17, 2022
[title in Japanese]
*Kentaro Sugimoto, Nian Liu, Naoya Yoshitaka, Hideaki Yamada, Yuko Akabane, Kentaro Kawai, Kenta Arima, Kazuya Yamamura
Author information
Keywords:
single-crystal diamond,
plasma-assisted polishing,
polishing pressure,
anisotropy in polishing
Pages 130-131
Details
