Proceedings of JSPE Semestrial Meeting
2022 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2022 JSPE Spring Conference

Location : [in Japanese]

Date : March 15, 2022 - March 17, 2022

Fabrication and evaluation of Si line patterns with controlled line edge roughness
*Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda, Satoru Takahashi
Author information
Keywords: Line edge roughness, Roughness measurement, Nano structure, Semiconductor, Lithography
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 309-310

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Abstract
[in Japanese]
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© 2022 The Japan Society for Precision Engineering
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