2022 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2022 JSPE Spring Conference
Location : [in Japanese]
Date : March 15, 2022 - March 17, 2022
Estimation of periodic error due to parasitic reflection in displacement measuring interferometer by frequency scanning
*Takuma Fukunaga, Myagmarskh Munkhbaatar, Masato Higuchi, Dong Wei, Masato Aketagawa
Author information
Keywords:
Displacement measurement Optical interferometer,
parasitic reflection,
periodic error,
frequency scanning
Pages 311-312
Details
