Proceedings of JSPE Semestrial Meeting
2023 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2023 JSPE Spring Conference

Location : [in Japanese]

Date : March 14, 2023 - March 16, 2023

Investigation of slurry flow path to top surface of workpiece in double-sided lapping
*Yohei Hashimoto, Tomoya Sasaki, Ryuki Shibasaki, Tatsuaki Furumoto, Tomohiro Koyano, Mitsugu Yamaguchi
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Keywords: Double-sided lapping, Slurry, Material removal rate, Lapping platen, Wafer carrier
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 783

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[in Japanese]
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© 2023 The Japan Society for Precision Engineering
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