2023 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2023 JSPE Spring Conference
Location : [in Japanese]
Date : March 14, 2023 - March 16, 2023
Visualization of polishing interface in chemical mechanical polishing of resin workpiece
*Mizuki Hatatani, Michio Uneda, Ishida Hiroyuki, Kazutoshi Hotta, Hitoshi Morinaga
Author information
Keywords:
Chemical Mechanical Polishing,
Slurry particles,
Resin substrate,
Digital Image Correlation method
Pages 784-785
Details
