Study on On-Machine Visualization of Surface Processing Phenomena in Nanoscale

9th report: Verification of Nano-Particle Diameter Measurement Accuracy using Multi-wavelength Evanescent Field

Abstract

We have proposed a dynamic observation method using multi-wavelength evanescent field for three-dimensional tracking and visualization to understand the motion of nano-particle in liquid near the surface. In this report, nanoparticles of different diameters were adhered on the tilt surface, which became invisible in water, and the absolute height of each position of the nano-particle in water was verified using multi-wavelength evanescent optical system and interference optical system, and the particle diameters were calculated from the measured absolute heights. The accuracy of the measurement was within ±5 nm of the actual particle diameter.